| AVS 63rd International Symposium & Exhibition | |
| Applied Surface Science | Tuesday Sessions |
| Session AS-TuP |
| Session: | Applied Surface Science Division Poster Session |
| Presenter: | Timothy Nunney, Thermo Fisher Scientific, UK |
| Authors: | T.S. Nunney, Thermo Fisher Scientific, UK R. Simpson, University of Surrey, UK C. Deeks, Thermo Fisher Scientific, UK P. Mack, Thermo Fisher Scientific, UK J.P.W. Treacy, Thermo Fisher Scientific, UK |
| Correspondent: | Click to Email |
Nano-scale multi-layered materials are becoming more common, especially in the microelectronics industry. Components used in applications such as flexible electrical circuitry are often made of stacked layers of material. These can include both organic and inorganic materials in a single component. Complications arise in depth profiling these kinds of components when transitioning across the interface between the two material types.
Depth profiling from an inorganic layer to an organic layer can produce an effect known as “jetting”. This is where material from the lower organic layer is rapidly ejected and redeposited around the etch crater, as a result of the high energy penetration of the inorganic material layer. As soon as the organic layer is exposed to the ion beam, the relative high energy ion beam needed to etch the inorganic layer, will cause material from the organic layer to burst out in this jetting effect.
This presentation will demonstrate the effects of jetting on a range of samples, illustrating how the ejection on deposition occurs depending on the type of sample and the ion beam mode type used. It will show differences between monatomic sputtering and cluster sputtering and showcase the benefits of both of these methods of depth profiling. A new form of rapid XPS mapping will be demonstrated allowing the jetting effect to be quickly observed.