| AVS 63rd International Symposium & Exhibition | |
| Applied Surface Science | Tuesday Sessions |
| Session AS+SS-TuA |
| Session: | Data Analytics in Surface Science and Nanoscience |
| Presenter: | Anders Mikkelsen, Lund University, Sweden |
| Authors: | T. Stankevic, Copenhagen University, Denmark U. Johansson, Lund University, Sweden L. Samuelson, Lund University, Sweden G. Falkenberg, DESY, Hamburg, Germany R. Feidenhans’l, Copenhagen University, Denmark A. Mikkelsen, Lund University, Sweden |
| Correspondent: | Click to Email |
Nanofocused X-ray beams are nondestructive probes that uniquely allow direct measurements of the nanoscale strain distribution and composition found at the interfaces and surfaces inside the micrometer thick layered structures ofmany electronic device architectures [1]. While the method has generally been considered time consuming, we demonstrate that by special design of X-ray nanobeam diffraction experiment we can (in a single 2D scan with no sample rotation) measure the individual strain and composition profiles of many structures in an array of upright standing nanowires[2]. We make use of the observation that in the generic nanowire device configuration, which is found in high-speed transistors, solar cells, and light-emitting diodes, each wire exhibits very small degrees of random tilts and twists toward the substrate. Although the tilt and twist are very small, they give a new contrast mechanism between different wires. In the present case, we image complex nanowires for nanoLED fabrication and compare to theoretical simulations, demonstrating that this fast method is suitable for real nanostructured devices.
We then go on to discuss the complications of data analysis as the amount of data available is dramatically increased with the advent of new highly coherent synchrotrons such as MAX IV in Lund Sweden [3] and improved experimental setups[2,4,5]. Using several detectors that give both real space fluorescence and 2D diffraction information combined with scanning both translational, rotational and time coordinates for in operando and in-situ studies in 3D - an enormous multidimensional dataset can be created in a few days. To fully retrieve all the information inside such dataset and pushing resolution and sensitivity limits new computational methods are needed in combination with advanced modelling.
[1] E. Lind et al., IEEE J. El. Dev. Soc. 3, 96 (2015); J. Wallentin et al., Science 339, 1057 (2013).
[2] T. Stankevic et al, ACS Nano 9 (2015) 6978
[3] ” Ultimate upgrade for US synchrotron”, Nature 501 (2013) 148
[4] U. Johansson, U. Vogt, A. Mikkelsen, Proc. SPIE 8851, X-Ray Nanoimaging: Instruments and Methods, 88510L (September 26, 2013); doi:10.1117/12.2026609
[5] T. Stankevic et al. Appl. Phys. Lett. 107 (2015) 103101