AVS 62nd International Symposium & Exhibition
    Vacuum Technology Monday Sessions

Session VT-MoM
Vacuum Measurement, Calibration, and Primary Standards

Monday, October 19, 2015, 8:20 am, Room 230B
Moderators: Bob Garcia, MKS Instruments, Joe Becker, Kurt J. Lesker Company


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Click a paper to see the details. Presenters are shown in bold type.

8:20am VT-MoM1 Invited Paper
History of Widely Used Vacuum Gauges and the Variations and Motivations That Occurred Along the Way: How Did We Get Where We Are?
Paul Arnold, MKS Instruments,Inc.,Granvillle-Phillips Product Center
9:00am VT-MoM3
MicroPirani MEMS Sensors for Vacuum Pressure Measurement - Looking Back and Ahead
Caspar Christiansen, O. Wenzel, MKS Granville-Phillips Division, Denmark
9:20am VT-MoM4
Performance Assessment of Absolute Capacitance Manometers Used in Long-term Irradiation Studies
Lily Wang, P.D. Honnell, Los Alamos National Laboratory
9:40am VT-MoM5
Analysis of Pressure Measurement Techniques from 1 kPa to 130 kPa
Jacob Ricker, J. Hendricks, National Institute of Standards and Technology
10:00am VT-MoM6
Comparisons between Capacitance Diaphragm Gauges with Different Types of Diaphragm Materials using Force-balanced Piston Gauge
HanWook Song, KRISS, Korea, Republic of Korea, M. Salazar, UST, Republic of Korea, S.Y. Woo, KRISS, Korea, Republic of Korea
10:40am VT-MoM8
Inverted Magnetron with Different Cathode Materials
Martin Wüest,  J. Marki, INFICON Ltd., Liechtenstein
11:00am VT-MoM9
Modern Day Challenges to Ionization Gauge Lifetimes
Gerardo Alejandro Brucker, S.C. Heinbuch, T.R. Swinney, MKS Granville-Phillips Division, Longmont
11:40am VT-MoM11
Photonic Realization of the Pascal: The Future of Pressure and Vacuum Metrology?
Jay Hendricks, J.E. Ricker, A. Stone, F. Egan, E. Scace, F. Strouse, National Institute of Standards and Technology