| AVS 62nd International Symposium & Exhibition | |
| Vacuum Technology | Monday Sessions |
| Session VT-MoM |
| Session: | Vacuum Measurement, Calibration, and Primary Standards |
| Presenter: | Caspar Christiansen, MKS Granville-Phillips Division, Denmark |
| Authors: | C. Christiansen, MKS Granville-Phillips Division, Denmark O. Wenzel, MKS Granville-Phillips Division, Denmark |
| Correspondent: | Click to Email |
It has been almost two decades since the invention of the MicroPirani MEMS sensor and its first introduction to the realm of vacuum pressure measurement. Based on the principle of thermal conductivity the MicroPirani sensor is in many ways similar to the traditional Pirani sensor that has been used for many decades for vacuum pressure measurement. Though similar, the MicroPirani offers several advantages, when compared to the standard Pirani including: a wider measuring range (1*10^-5 torr to atmospheric pressure), better accuracy, better thermal stability, increased robustness and lifetime. Over the last few years our group has dedicated significant effort to the understanding of the interactions between the MicroPirani MEMS sensor and several process chemistries with the ultimate goal of improving accuracy and long-term stability. As an example of our most recent progress, a new coated version of the MicroPirani sensor will be presented to address potential issues relating to corrosive gases in some of the most demanding vacuum applications. The coating does not compromise the current performance of the MicroPirani but serves as a protective layer for all MEMS sensor components.