| AVS 62nd International Symposium & Exhibition | |
| Plasma Science and Technology | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:20pm | PS+EM-MoA1 Invited Paper Forward and Inverse Computational Tools for Directed Self-Assembly G.H. Fredrickson, Sean Paradiso, University of California at Santa Barbara |
| 3:00pm | PS+EM-MoA3 Improvement of Block Copolymer Masked Silicon Etch Profile using Neutral Beam Deokhyun Yun, J.W. Park, H.S. Kim, G.Y. Yeom, Sungkyunkwan University, Republic of Korea |
| 3:20pm | PS+EM-MoA4 Plasma Etching of Directed Self Assembly based Patterns for Aggressively Scaled CMOS Applications Hiroyuki Miyazoe, H. Tsai, R.L. Bruce, S.U. Engelmann, M. Brink, A. Pyzyna, IBM T.J. Watson Research Center, C. Liu, IBM Albany Nanotech Center, A. Vora, D. Sanders, IBM Almaden Research Center, M. Maher, W. Durand, C. Ellison, G. Willson, The University of Texas at Austin, M. Guillorn, E.A. Joseph, IBM T.J. Watson Research Center |
| 4:00pm | PS+EM-MoA6 Invited Paper Microplasma Based Synthesis of Nanomaterials Michael Gordon, University of California at Santa Barbara |
| 4:40pm | PS+EM-MoA8 Nucleation of Silicon Nanocrystals in a Remote Plasma without Subsequent Coaguation Ilker Dogan, Eindhoven University of Technology, Netherlands, S.L. Weeks, S. Agarwal, Colorado School of Mines, M.C.M. van de Sanden, Dutch Institute for Fundamental Energy Research (DIFFER), Netherlands |
| 5:00pm | PS+EM-MoA9 Atmospheric Plasma Synthesis of Metallic Platinum Nanoparticles for PEMFC Technology using an Organometallic-Carbon Solution Nebulized in the Post-Discharge of an RF Torch Joffrey Baneton, D. Merche, ULB, Belgium, M. Raes, VUB, Belgium, V. Debaille, ULB, Belgium, G. Caldarella, V. Stergiopoulos, ULg, Belgium, H. Terryn, VUB, Belgium, N. Job, ULg, Belgium, F.A.B. Reniers, ULB, Belgium |
| 5:20pm | PS+EM-MoA10 Low Energy Helium Ion Irradiation Induced Surface Modification of Metals Irem Tanyeli, FOM Institute DIFFER, Netherlands, L. Marot, D. Mathys, University of Basel, Switzerland, M.C.M. van de Sanden, FOM Institute DIFFER, Netherlands, G. De Temmerman, ITER Organization |