| AVS 62nd International Symposium & Exhibition | |
| Materials Characterization in the Semiconductor Industry Focus Topic | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| MC-TuP1 Effect of Aromatic Compounds on Semiconducting Boron Carbide Heterojunctions Elena Echeverria, University of Nebraska - Lincoln, R. James, F. Pasquale, B. Dong, University of North Texas, A. Enders, University of Nebraska - Lincoln, A. Kelber, University of North Texas, P.A. Dowben, University of Nebraska - Lincoln |
| MC-TuP2 3 Dimensional Quantitative Composition and Structure Profiling of As Implanted Si USJ and FINFET with TOF-MEIS WonJa Min, K.S. Park, K.-S. Yu, KMAC, Republic of Korea, S.J. Joo, Y.-S. Kim, KRISS, Republic of Korea, D.W. Moon, DGIST, Republic of Korea |
| MC-TuP3 Characterization of the Doped Amorphous Carbon Hardmask Film Prepared by Hybrid Plasma CVD Systems Jaeyoung Yang, K.P. Park, G.H. Hur, TES Co. Ltd., Republic of Korea |
| MC-TuP4 Surface Structure and Morphology of GaAs Nanowires Grown by Aerotaxy Sofie Yngman, S. McKibbin, J. Knutsson, F. Yang, E. Lundgren, M. Magnusson, R. Timm, A. Mikkelsen, Lund University, Sweden |
| MC-TuP5 Characterization of Si/Ru and Si/B4C/Ru Multilayers using X-ray Reflectivity, X-ray Diffraction and Synchrotron-based EUV Reflectometry Mohammad Faheem, GLOBALFOUNDRIES Inc., P. van der Heide, GLOBALFOUNDRIES, Inc., O. Wood, Y. Liang, A. Kumar Kambham, K. Wong, V. Park, P. Mangat, GLOBALFOUNDRIES Inc. |