| AVS 61st International Symposium & Exhibition | |
| Vacuum Technology | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | VT-MoA1 A Capacitance Diaphragm Gauge with 10 mTorr Full Scale Martin Wüest, INFICON Ltd., Liechtenstein, P. Björkman, J. Bäckman, INFICON Ab, Finland |
| 2:20pm | VT-MoA2 What if Saving Energy become Important on Bayard Alpert Hot Ionization Gauges? Simon Naef, INFICON Ltd., Liechtenstein |
| 3:40pm | VT-MoA6 Invited Paper How to Create as Less as Possible to Make the Best as Possible Norbert Koster, TNO Technical Sciences, Netherlands |
| 4:20pm | VT-MoA8 Study of Potential Particle Generation by Ion Sources During EUV Mask Blank Deposition Ivan Shchelkanov, A.M. Lietz, J. Pachicano, University of Illinois at Urbana-Champaign, A. Antohe, P. Kearney, SEMATECH, D.N. Ruzic, University of Illinois at Urbana-Champaign |
| 4:40pm | VT-MoA9 Particle Defect Reduction in EUV Mask Blank Production Devices Amanda Lietz, I.A. Shchelkanov, University of Illinois at Urbana-Champaign, A. Hayes, Veeco Instruments, Inc., J. Pachicano, S. Keniley, D.N. Ruzic, University of Illinois at Urbana-Champaign |
| 5:00pm | VT-MoA10 Invited Paper VTD Early Career Award: Novel Vacuum Processing of Thin-Film Photovoltaic Materials Jason D. Myers, J.A. Frantz, R.Y. Bekele, V.Q. Nguyen, C.C. Baker, S.C. Erwin, N.D. Bassim, U.S. Naval Research Laboratory, A. Bruce, S.V. Frolov, Sunlight Photonics, J.S. Sanghera, U.S. Naval Research Laboratory |