| AVS 61st International Symposium & Exhibition | |
| Exhibitor Technology Spotlight | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 10:20am | EW-TuM8 High Speed Water Vapor Cryopumps: Increasing Tool Throughput and Process Yield with Polycold PFC and MaxCool Products C. Rebecchi, Kevin Flynn, Brooks Automation, Inc., Polycold |
| 10:40am | EW-TuM9 Stylus Profilometry – Bruker’s DektakXTL delivers Innovation in Flexibility and Ease of Use Eric Rufe, Bruker |