| AVS 61st International Symposium & Exhibition | |
| Thin Film | Thursday Sessions |
| Session TF-ThP |
| Session: | Thin Films Poster Session |
| Presenter: | Ismael Garduño-Wilches, CINVESTAV-IPN, México |
| Authors: | I.A. Garduño-Wilches, CINVESTAV-IPN, México A. Maldonado Álvarez, CINVESTAV-IPN, México D.R. Acosta-Najarro, Universidad Nacional Autonoma de México |
| Correspondent: | Click to Email |
Titanium-dioxide films are produced by the dip coating method, using a solution of 2-propanol and titanium isopropoxide in a concentration of 0.17M and an immersion speed of 0.122 cm/s. Films with different thickness are obtained by changing the number of immersion cycles. Analysis results indicate that the obtained films present the TiO2 anatase structure when treated at 400 °C for 3 hrs, the film thickness ranged from 20nm to 150 nm and the rate deposition is of 18 nm/cycle.
Gas sensing studies indicate that at a work temperatures of 300 °C sensors present a significant change in electrical resistance. When analyzing sensors sensitivity as a function of propane concentration and film thickness a two-regime behavior is observed, being the sensitivity independent of the film thickness when partial pressures are above 400 ppm, and thickness dependant at lower partial pressures. The maximum sensitivity is obtained in the range from 5 ppm to 300 ppm for the film grown with 5 immersion cycles.