| AVS 61st International Symposium & Exhibition | |
| Plasma Science and Technology | Wednesday Sessions |
| Session PS-WeA |
| Session: | Plasma Diagnostics, Sensors, and Control |
| Presenter: | David Boris, Naval Research Laboratory |
| Authors: | D.R. Boris, Naval Research Laboratory R.F. Fernsler, Naval Research Laboratory G.M. Petrov, Naval Research Laboratory Tz.B. Petrova, Naval Research Laboratory S.G. Walton, Naval Research Laboratory |
| Correspondent: | Click to Email |
Electron beam generated plasmas are characterized by high plasma densities and very low electron temperatures, making them well-suited for next-generation processing techniques where high fluxes of low energy ions are desirable. In this work, we focus on plasma generation in fluorine containing gas backgrounds due to their relevance to a number of industrial plasma applications. In particular, we focus on the effect of fluorine-containing gas dilution on the plasma properties of electron beam generated plasmas including electron density, total plasma density, electronegativity, and electron temperature. These parameters are measured through a combination of Langmuir probe, and RF impedance spectroscopy techniques.