| AVS 61st International Symposium & Exhibition | |
| Plasma Science and Technology | Tuesday Sessions |
| Session PS-TuP |
| Session: | Plasma Science and Technology Poster Session |
| Presenter: | Alan Hoskinson, Tufts University |
| Authors: | A.R. Hoskinson, Tufts University H.C. Thejaswini, Tufts University J. Hopwood, Tufts University |
| Correspondent: | Click to Email |
Microwave-driven microplasmas allow for the generation of cold atmospheric-pressure plasmas at higher time-averaged electron densities (~1014 cm-3) than most other techniques. These high densities may open unique regimes for high-pressure materials processing. The low ion energies (due to the short mean free paths at atmospheric pressure) may be partially compensated for by extremely large fluxes of ions and energetic metastable species while maintaining low gas temperatures. We present data from exploratory experiments showing rapid deposition of diamond-like carbon films at atmospheric pressure using a single microplasma. The development of one- and two-dimensional arrays of such microplasmas demonstrates a path towards film deposition on moderate-area substrates.