| AVS 61st International Symposium & Exhibition | |
| Plasma Science and Technology | Tuesday Sessions |
| Session PS-TuP |
| Session: | Plasma Science and Technology Poster Session |
| Presenter: | John Poulose, University of Texas at Dallas |
| Authors: | J. Poulose, University of Texas at Dallas L.J. Overzet, University of Texas at Dallas M.J. Goeckner, University of Texas at Dallas |
| Correspondent: | Click to Email |
Pulsed plasma provides a method to ‘independently' control ion and neutral fluxes. Temporal and spatial evolutions of the pulsed plasmas have been studied to provide a better understanding of transitory behavior in such systems. The optical emission intensities (OEIs) of various lines (atomic and molecular) from pulsed plasmas through Ar, O2, and N2 gases have been collected. The RF power was turned on and off at frequencies of 1, 10 and 100 kHz with a 50% duty cycle. The OEIs measured from argon plasma have shown a longer turn on/off time than those measured from O2 or N2 pulsed plasmas. Specifically, the OEIs measured from pulsed argon plasmas are still rising at the end of the on-time and do not completely extinguish at the end of the off-time at 100 kHz. This is in comparison to pulsed plasmas through both O2 and N2 in which the OEIs completely extinguish during the off-time and reach an apparent steady state level during the on-time. Additionally, the OEIs contract radially just after the start of the on-time for pulsed plasmas through argon, but a similar radial contraction phase is not found in the other gases. The radial extent of the OEIs in O2 and N2 remains essentially constant. We will present these results and the effects of other parameter and gases on the transitory behavior of pulsed discharges.
This material is based upon work supported by the National Science Foundation under Grant No. NSF IIP1338917.