| AVS 61st International Symposium & Exhibition | |
| Nanometer-scale Science and Technology | Tuesday Sessions |
| Session NS+HI-TuM |
| Session: | Nanopatterning and Nanolithography |
| Presenter: | Brett Lewis, University of Tennessee |
| Authors: | B.B. Lewis, University of Tennessee M.G. Stanford, University of Tennessee H. Plank, Graz University of Technology, Austria J.H. Noh, University of Tennessee J. Fowlkes, Oak Ridge National Laboratory P.D. Rack, University of Tennessee |
| Correspondent: | Click to Email |
Electron Beam Induced Deposition (EBID) is a direct write mode capable of fabricating highly precise nanoscale structures by employing a scanning electron beam to disassociate adsorbed precursor molecules which subsequently condense on a substrate. The major drawback of the EBID process is that high purity metallic deposition is rarely achieved due to residual impurities attributed to the inadequate disassociation of the precursor molecule remaining in the final structure. Thus, purification strategies for nanoscale EBID deposits has been a critically important research area as EBID is poised to impact many nanoscale science and technology applications. To this end, our recent work has been focused on the post-deposition purification of EBID structures. We demonstrate a room temperature purification method in which platinum–carbon nanostructures deposited from MeCpPtIVMe3 are purified by the presence of oxygen gas during a post-electron exposure treatment. Deposit thickness, oxygen pressure and oxygen temperature studies suggest that the dominant mechanism is the electron stimulated reaction of oxygen molecules adsorbed at the defective deposit surface. In this presentation we will overview the electron-stimulated reaction regimes as a function of oxygen partial pressure and temperature, and electron beam current and energy. We will overview electron stimulated reaction and adsorption/diffusive transport models to demonstrate that, for our experimental regime, we believe the rate-limiting mechanism is oxygen adsorption/transport. In addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the carbon removal of the as-deposited materials . Notably, pure platinum deposits with low resistivity and retain the original deposit fidelity were accomplished at room temperature.