| AVS 61st International Symposium & Exhibition | |
| Materials Characterization in the Semiconductor Industry Focus Topic | Tuesday Sessions |
| Session MC-TuP |
| Session: | Poster Session for all areas of Materials Characterization in the Semiconductor Industry |
| Presenter: | Richard Sun, Angstrom Sun Technologies Inc. |
| Authors: | R. Sun, Angstrom Sun Technologies Inc. N. Sun, Angstrom Sun Technologies Inc. |
| Correspondent: | Click to Email |
Under guidance of International SEMATECH Manufacturing Initiative(ISMI), Angstrom Sun Technologies Inc developed the first tabletop spectroscopic ellipsometer for 450mm wafer application. A few challenges regarding wafer handling and small edge exclusion requirement will be discussed. With improved modeling, spectroscopic ellipsometry could also be used to determine EBR profile of photoresist by linear line scan near the wafer edge.