| AVS 61st International Symposium & Exhibition | |
| Helium Ion Microscopy Focus Topic | Thursday Sessions |
| Session HI-ThP |
| Session: | Aspects of Helium Ion Microscopy Poster Session |
| Presenter: | Nico Klingner, Helmholtz-Zentrum Dresden - Rossendorf, Germany |
| Authors: | N. Klingner, Helmholtz-Zentrum Dresden - Rossendorf, Germany R. Heller, Helmholtz-Zentrum Dresden - Rossendorf, Germany G. Hlawacek, Helmholtz-Zentrum Dresden - Rossendorf, Germany S. Facsko, Helmholtz-Zentrum Dresden - Rossendorf, Germany J. von Borany, Helmholtz-Zentrum Dresden - Rossendorf, Germany |
| Correspondent: | Click to Email |
Helium ion microscopes (HIM) have become powerful imaging devices within the last decade. Their enormous lateral resolution of below 0.3 nm and the highest field of depth make them a unique tool in surface imaging. So far the possibilities to identify target materials (elements) are rather limited.
In the present contribution we will show concepts as well as preliminary studies on the capability, efficiency and the limits of applying (Rutherford) Backscattering Spectrometry (RBS) within a HIM device to image samples with target mass contrast and to analyze target compositions.
We will present different concepts of how to realize RBS in a HIM and point out mayor challenges and physical limitation.