AVS 60th International Symposium and Exhibition, Session TF+AS+SE+SS-MoA

AVS 60th International Symposium and Exhibition
Thin Film	Monday Sessions

Session TF+AS+SE+SS-MoA
ALD/MLD Surface Reactions, Precursors, and Properties

Monday, October 28, 2013, 2:00 pm, Room 104 A
Moderators: R.K. Grubbs, Sandia National Laboratories, J.S. Jur, North Carolina State University

Click here to Download program book for this session
in Adobe Acrobat format

Click a paper to see the details. Presenters are shown in bold type.

2:00pm	TF+AS+SE+SS-MoA1 Invited Paper Growth of Metallic First Row Transition Metal Films by Atomic Layer Deposition from New Precursors C.H. Winter, L.C. Kalutarage, Wayne State University
2:40pm	TF+AS+SE+SS-MoA3 O₂ based Ru ALD using CpRu(CO)₂Et: First-principles, Experiments and Micro-kinetic Modeling C.K. Ande, N. Leick, Eindhoven University of Technology, Netherlands, S.D. Elliott, Tyndall National Institute, Ireland, W.M.M. Kessels, Eindhoven University of Technology, Netherlands
3:00pm	TF+AS+SE+SS-MoA4 The Chemistry of the Cu(I) s-Butyl Amidinate Atomic Layer Deposition (ALD) Precursor on Ni and Cu Surfaces Y. Yao, T. Kim, J. Coyle, S.T. Barry, F. Zaera, University of California, Riverside
3:40pm	TF+AS+SE+SS-MoA6 Quantitative In Situ Infrared Analysis of Reactions between Trimethylaluminum and Polymers during Al₂O₃ Atomic Layer Deposition G.N. Parsons, B. Gong, P.S. Williams, North Carolina State University
4:00pm	TF+AS+SE+SS-MoA7 Surface Reactions during the ALD of TiO₂ on Si and GaAs Surfaces Studied by In Situ ATR-FTIR L. Ye, T. Gougousi, University of Maryland, Baltimore County
4:20pm	TF+AS+SE+SS-MoA8 Metal Oxide/Carbon Composite Films by Pyrolysis of Hybrid Organic-Inorganic MLD Films J. Travis, S.M. George, University of Colorado at Boulder
4:40pm	TF+AS+SE+SS-MoA9 Molecular Layer Deposition of Organic-Inorganic Hybrid Materials for Implant BARC Applications L.N.J. Rodriguez, C. Adelmann, B. Sutens, G. Winroth, A. Delabie, R. Gronheid, S. Van Elshocht, IMEC, Belgium
5:00pm	TF+AS+SE+SS-MoA10 Mechanical Property Modification of Fiber Forming Polymers by Sequential Organometallic Exposures R.P. Padbury, J.S. Jur, North Carolina State University
5:20pm	TF+AS+SE+SS-MoA11 Vapor-Phase Modification of Simple Sugars Towards New Hybrid Organic-Inorganic Materials K. Gregorczyk, L. Zhang, M. Knez, CIC nanoGUNE, Spain