AVS 60th International Symposium and Exhibition
    Vacuum Technology Wednesday Sessions
       Session VT-WeM

Paper VT-WeM3
Novel Approaches in the Pumping Speed Characterization of NEG, SIP and their Combination in UHV Systems

Wednesday, October 30, 2013, 8:40 am, Room 202 C

Session: Pumps, Accelerators and Large Vacuum Systems
Presenter: F. Siviero, SAES Getters, Italy
Authors: F. Siviero, SAES Getters, Italy
A. Bonucci, SAES Getters, Italy
A. Conte, SAES Getters, Italy
L. Caruso, SAES Getters, Italy
T. Porcelli, SAES Getters, Italy
L. Viale, SAES Getters, Italy
G. Bongiorno, SAES Getters, Italy
E. Maccallini, SAES Getters, Italy
P. Manini, SAES Getters, Italy
Correspondent: Click to Email
Thanks to their compactness and large pumping speed for H2 and oxygenated gases Non Evaporable Getter (NEG) pumps are effective solutions in a variety of applications from particle accelerators to surface science equipment, scanning/transmission electron microscopes and other analytical systems or sealed off devices. The quest for more compact, efficient and performing UHV pumping systems, is however pushing towards the development of new and innovative pump designs. A deeper understanding of the pumping mechanisms and the development of suitable pumping speed characterization techniques, is key to achieve this objective. In the present paper we update on the activities being carried out at SAES R&D Labs on the characterization of getter and ion pumps performances, either tested separately or in combination. In particular we provide highlights on the experimental methodology and data analysis which have been introduced to overcome some limitations coming from the use of the well-known ASTM F798-97 standard method for the measurement of sorption curves at constant pressure. At the heart of this approach, is the extensive use of the quadrupole mass spectrometry which allows to identify and separate the different gas sorption/desorption mechanisms taking place during the simultaneous operation of NEG and SIP. A better understanding of the actual pumping speed for gases, as well as synergies or interference in a NEG/SIP structure is therefore possible.