AVS 60th International Symposium and Exhibition
    Vacuum Technology Wednesday Sessions
       Session VT-WeM

Invited Paper VT-WeM1
Recent Innovation in Dry Pumping Technology

Wednesday, October 30, 2013, 8:00 am, Room 202 C

Session: Pumps, Accelerators and Large Vacuum Systems
Presenter: A.D. Chew, Edwards, UK
Authors: A.D. Chew, Edwards, UK
I. Stones, Edwards, UK
N. Schofield, Edwards, UK
Correspondent: Click to Email
Dry pump technologies have become routinely utilized in, and for, a wide range of vacuum based applications. Some of the most recent significant developments in dry technologies, including scroll, screw, roots-claw and turbo-molecular, will be discussed with reference to improved operation and productivity, maintenance and minimised environmental impact and cost of ownership. Specific examples will include semiconductor and flat panel production, mass spectrometry and chemical processing.