| AVS 60th International Symposium and Exhibition | |
| Thin Film | Thursday Sessions |
| Session TF-ThP |
| Session: | Thin Films Poster Session |
| Presenter: | T.H. Lin, National Taiwan University, Taiwan, Republic of China |
| Authors: | T.H. Lin, National Taiwan University, Taiwan, Republic of China Y.J. Yang, National Taiwan University, Taiwan, Republic of China C.C. Wang, National Taiwan University, Taiwan, Republic of China C.C. Hsu, National Taiwan University, Taiwan, Republic of China |
| Correspondent: | Click to Email |
Coating in the lumen surface of long and thin tubes has been highly desired yet challenging. In this work, generation of stable plasmas in a long thin tube and the use of such plasmas to perform plasma polymerization in the lumen surface of the tube are presented. By inserting a specially designed long thin electrode into the tube, stable Ar or He discharges can be sustained in tubes with the inner diameter down to 0.26 mm and the length up to 1 m under atmospheric pressure using an AC power source. This system is then used to perform plasma polymerization in the lumen surface of a tube 1 mm in inner diameter. When allylamine is used as the precursor, carried by Ar gas flow, films containing NHx can be obtained through plasma polymerization. The film composition is examined by ATR-FTIR. The spectra show the absorption at 3274 cm-1, which is attributed to NHx, and the absorption at 1658cm-1, contributed by C=N, C=C, or N-H. Further analyses using SEM, XPS, and AFM show that smooth film with NHx–bonded surface can be obtained. Such an approach offers a promising approach in various fields such as biomaterial application.