AVS 60th International Symposium and Exhibition
    Surface Science Wednesday Sessions
       Session SS+EM-WeA

Paper SS+EM-WeA10
Lowering the Density of Electronic Defects on Organic-Functionalized Si(100) Surfaces

Wednesday, October 30, 2013, 5:00 pm, Room 201 A

Session: Semiconductor Surfaces and Interfaces
Presenter: W. Peng, University of Texas at Dallas
Authors: W. Peng, University of Texas at Dallas
W.J. De Benedetti, University of Texas at Dallas
S. Kim, University of Texas at Dallas
M.A. Hines, Cornell University
Y.J. Chabal, University of Texas at Dallas
Correspondent: Click to Email

The integration of self-assembled monolayers (SAM) with semiconductor surfaces helps to provide the functionality necessary for various application possibilities, ranging from molecular electronics, hybrid optoelectronics to chemical sensing. So far, Si(111) surfaces have been the most explored systems mainly due to the fact that atomically flat hydrogen terminated Si(111) surfaces can be easily prepared for further chemical functionalization. Recently a method to produce quasi atomically flat H-Si(001) surfaces has been developed1 and the surface structure carefully studied with FTIR analysis, STM imaging and kinetic Monte Carlo simulations.

In this work, we compare the density of interface electronic states after organic functionalization (hydrosilylation) on both atomically rough and atomically flat Si(100) surfaces. Although differences in surface morphology are not detectable with FTIR or XPS, conductance voltage measurements2 are able to detect a clear difference in interface state densities Dit (i.e., defect densities). Specifically, atomically flat Si(100) surfaces functionalized with C11H23 monolayers have Dit values three times lower than those of rough functionalized surfaces, leading to Dit values very close to our previous results on atomically-flat Si(111) surfaces functionalized with the same molecule.2 These findings open the way for integrating common functionalization methods using the technologically important Si(100) surfaces to meet the needs of critical applications.

1M. A. Hines, M. F. Faggin, A. Gupta, B. S. Aldinger, and K. Bao, J. Phys. Chem. C 116 (35), 18920 (2012).

2W. Peng, O. Seitz, R. A. Chapman, E. M. Vogel, and Y. J. Chabal, Appl. Phys. Lett. 101 (5) (2012).