AVS 60th International Symposium and Exhibition
    Plasma Science and Technology Monday Sessions
       Session PS+AS+BI+SE-MoM

Paper PS+AS+BI+SE-MoM4
A Flexible Paper-based Microdischarge Array Device for Maskless Patterning on Nonflat Surfaces

Monday, October 28, 2013, 9:20 am, Room 102 B

Session: Atmospheric Plasma Processing: Fundamental and Applications
Presenter: Y.J. Yang, National Taiwan University, Taiwan, Republic of China
Authors: Y.J. Yang, National Taiwan University, Taiwan, Republic of China
M.Y. Tsai, National Taiwan University, Taiwan, Republic of China
W.C. Liang, National Taiwan University, Taiwan, Republic of China
H.Y. Chen, National Taiwan University, Taiwan, Republic of China
C.C. Hsu, National Taiwan University, Taiwan, Republic of China
Correspondent: Click to Email
This study presents a simple and economical paper-based microdischarge array for maskless surface patterning under atmospheric pressure condition. This paper-based system is a dielectric-barrier-discharge (DBD)-type device and stable plasmas can be sustained in an array of cavities. Due to its flexible feature, this paper-based device allows for performing non-flat surface patterning processes with a feature size down to 500 μm. When a flat or a curved glass surface with 6 mm in its curvature is directly treated by the Ar plasma generated by this device, hydrophilic spots can be generated on the flat or curved surface, respectively. While using tetraglyme as the precursor in Ar atmosphere, this paper-based device is able to perform plasma polymerization and to pattern polyethylene oxide (PEO)-like array of patterns on glass surfaces. Under this arrangement, the optical emission spectrum emanating from the plasma show CO emissions at 561 nm during the deposition process, suggesting that the participation of precursor molecules in the process. The FTIR spectra of deposited films show absorption of C-O-C bonding at 1100 cm-1, indicating retaining of ether groups. To test the anti-fouling property of this film, Alexa Fluor 546-conjugated fibrinogen was utilized as a model reporter molecule for protein absorption test. The fluorescence image shows clear contrast between the coated and non-coated area. The PEO-pattered regions appear to be dark since no protein absorption occurs. This work demonstrates a flexible and cost-effective approach to pattern flat and non-flat surfaces with a maskless process. This work was supported by National Science Council of Taiwan, the Republic of China (101-2221-E-002-163-MY2)