| AVS 60th International Symposium and Exhibition | |
| Helium Ion Microscopy Focus Topic | Thursday Sessions |
| Session HI-ThA |
| Session: | Imaging and Lithography with Helium Ions |
| Presenter: | A. Beyer, Bielefeld University, Germany |
| Correspondent: | Click to Email |
In my talk, I will present a helium-ion microscopy (HIM) study of biological cells and carbon nanomembranes (CNMs). The cells were imaged without conductive coating and the attainable high resolution allowed imaging of extremely small features at the cell surface. Charging of these specimens was effectively compensated by the electron flood gun.
HIM is also a very efficient imaging tool for characterizing CNMs which exclusively consist of surface-near atoms. These 1 nm thick membranes yield a high secondary electron signal, provided that charging is absent. This condition is fulfilled by choosing a suitable beam current or employing the electron flood gun.
Aspects of helium ion beam lithography will also be discussed. In particular, I will show the fabrication of patterned CNMs by local cross-linking of aromatic self-assembled monolayers with helium ions.