| AVS 60th International Symposium and Exhibition | |
| Applied Surface Science | Wednesday Sessions |
| Session AS-WeA |
| Session: | Developments in Electron Spectroscopies for Non-Ideal Samples 2 |
| Presenter: | H. Piao, General Electric Co. |
| Authors: | H. Piao, General Electric Co. L. Le Tarte, General Electric Co. D.F. Paul, Physical Electronics Inc. |
| Correspondent: | Click to Email |
Auger Electron Spectroscopy (AES) is one of the most widely used techniques for quantitative surface analysis. AES is the dominant technique in numerous applications in industries. The advantage of high spatial resolution in AES makes it an attractive technique over XPS in solving new types of problems in a diverse range of technologies that are growing in importance. The presentation gives an emphasis on unique advances in surface analysis using AES, including the application of TEM specimen preparation techniques (FIB, microtome and ion-milling). We also demonstrate high energy resolution applications for chemical states analysis by the concept of the sample biasing method [1].
Keywords: AES, energy resolution, chemical states
[1] D.S. Watson, P.E. Larson, D.F. Paul and R.E. Negri, Surf. Interface Anal. 44 (2012) 121.