| AVS 60th International Symposium and Exhibition | |
| Applied Surface Science | Thursday Sessions |
| Session AS-ThP |
| Session: | Applied Surface Science Poster Session |
| Presenter: | R. Price, Physical Electronics Inc. |
| Authors: | R. Price, Physical Electronics Inc. G.L. Fisher, Physical Electronics Inc. S.R. Bryan, Physical Electronics Inc. J.S. Hammond, Physical Electronics Inc. I. Ishizaki, ULVAC-PHI, Inc., Japan S. Iida, ULVAC-PHI, Inc., Japan T. Miyayama, ULVAC-PHI, Inc., Japan |
| Correspondent: | Click to Email |
Five synergistic performance characteristics of the new PHI nanoTOF to improve the analysis of polymer and biological samples will be discussed. These desired characteristics are the ultimate spatial resolution, mass resolution, mass range, insensitivity to topographical artifacts and ultimate abundance sensitivity. A new LMIG has been developed which can simultaneously achieve a typical spatial resolution of 400 nm and a mass resolution greater than 10,000 m/Δm. When combined with the nanoTOF analyzer, topographical features within a depth of field of 200 µm can be imaged. To extend the molecular sensitivity beyond the traditional static SIMS limit of 1013 incident ions/cm2, the use of voxel analysis can be used. For voxel analysis, an image is acquired to the static limit, followed by the removal of the damaged surface layer with Gas Cluster Ion Beam (GCIB) source, followed by additional cycles of LMIG acquisition and GCIB damage removal. By integrating signal intensities as a function of GCIB depth of removal, three dimensional voxels of data can be acquired with much higher molecular sensitivities than data only acquired to the static SIMS limit.
Data from a mixed phase polymer sample, micron sized organic contamination features on a failure analysis sample and images of biological samples will be discussed. Retrospective quantitative line scans and spectra from these samples will demonstrate the advantages of these new capabilities for TOF-SIMS polymer and biological sample analyses.