| AVS 60th International Symposium and Exhibition | |
| Applied Surface Science | Thursday Sessions |
| Session AS-ThP |
| Session: | Applied Surface Science Poster Session |
| Presenter: | C.Y. Chou, National Taiwan University, Taiwan, Republic of China |
| Authors: | C.Y. Chou, National Taiwan University, Taiwan, Republic of China P.R. Chou, Chinese Culture University, Taiwan, Republic of China J. Lee, Optimization Solutions Asia Engineering Co. Ltd., Taiwan, Republic of China R.B. Lin, Chinese Culture University, Taiwan, Republic of China C.C. Hsu, National Taiwan University, Taiwan, Republic of China |
| Correspondent: | Click to Email |
Laser Induced Breakdown Spectroscopy (LIBS) is a technique for elemental analysis on inorganic and organic materials. It uses a pulsed laser beam to ablate the surface of the target materials and generate plasma. By analyzing the optical emission spectra emanating from the plasma, information related the ablated material composition can be obtained. The key features for LIBS include fast analysis, simultaneous multiple element detection, analysis under ambient atmosphere, and no or very little need for sample preparation. In this presentation, LIBS analysis on thin film samples is performed with the goal of understanding its capability to detect polymer thin film materials and to perform surface mapping. The LIBS system (Insight, TSA) is equipped with a pulsed laser and a charge-coupled device (CCD). LIBS systems equipped with 266 and 1064 nm laser sources are tested under air and argon atmosphere. The polymer films tested are fluorocarbon (FC) thin films coated on silicon wafer and glass substrates. Results show that when the 1064 nm system is used, clear C- and F-emissions can be observed for FC coated substrates with a coating thickness down to 100 nm. While using the 266 nm laser, rather poor signal to noise ratio is obtained for F- and C-emissions. Substrates patterned with 500 mm wide stripes FC thin films are then tested to obtain spatially resolved information for the patterned surfaces. By using the 1064 nm laser source, spatial resolution of approximately 100 mm can be obtained. This demonstrates the capability using LIBS as the spatially-resolved surface mapping of polymer films for thin films. This work was supported by National Science Council of Taiwan, the Republic of China (101-2221-E-002-163-MY2)