| AVS 60th International Symposium and Exhibition | |
| Applied Surface Science | Monday Sessions |
| Session AS-MoA |
| Session: | Analyses Using Novel Ion Beams |
| Presenter: | J.D.P. Counsell, Kratos Analytical Limited, UK |
| Authors: | J.D.P. Counsell, Kratos Analytical Limited, UK S.J. Coultas, Kratos Analytical Limited, UK C.J. Blomfield, Kratos Analytical Limited, UK S.J. Hutton, Kratos Analytical Limited, UK A.J. Roberts, Kratos Analytical Limited, UK |
| Correspondent: | Click to Email |
Lead zirconate titanate (PZT) is a ceramic perovskite material which exhibits piezoelectric properties. PZT is currently used in numerous applications including sensors and actuators and is currently being developed for use in memory devices. Thin-films of PZT were grown on Pt/TiO2/SiO2/Si substrates using CVD. Chemical analysis and stoichiometry of the surface was performed using XPS.
This paper will discuss the changes in stoichiometry and chemical states under ion bombardment. A variety of different ions (Ar+, C24H12+, Ar(500-2000)+) and beam energies were used to gain information regarding the internal structure of this material. Depth profiling showed good compositional homogeneity through each film thickness, with some lead segregation at the film surface. Optimised conditions for depth profiling inorganic materials are proposed. Processes such as preferential sputtering, sample damage and surface charging are discussed. Previous studies have concentrated on the use of Ar+ as the bombardment ion however we show that by using gentler ions it is possible to reduced bulk damage and preferential sputtering of the complex surface.
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