| AVS 59th Annual International Symposium and Exhibition | |
| MEMS and NEMS | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:40am | MN-TuM3 Invited Paper Focused Ion Beam Fabrication for Nanophotonics and Microsystems Integration I.W. Jung, Argonne National Laboratory |
| 9:20am | MN-TuM5 Nanomechanical Resonator Detection using Racetrack Resonator Structures for Use in Mass Sensing V.T.K. Sauer, Z. Diao, M.R. Freeman, W.K. Hiebert, University of Alberta and The National Institute for Nanotechnology, Canada |
| 9:40am | MN-TuM6 Fabrication and Characterization of Ultra-Fast Electrostatically-Actuated Surface Micro-Machined Aluminum Mirrors J.R. Fox, A.D. Mathias, J.P. Cortes, M.S. Allen, S.B. Horowitz, Ducommun Miltec, M.G. Temmen, M. Sanghadasa, U.S. Army Aviation and Missile Research Development and Engineering Center |
| 10:40am | MN-TuM9 A Comparison of Different Releasing Methods in Fabricating Nano-Optomechanical Devices Z. Diao, National Institute for Nanotechnology, NRC Canada and University of Alberta, Canada, V.T.K. Sauer, J.E. Losby, M.R. Kan, M.R. Freeman, University of Alberta and The National Institute for Nanotechnology, Canada, W.K. Hiebert, National Institute for Nanotechnology, NRC Canada and University of Alberta, Canada |
| 11:00am | MN-TuM10 Optomechanical Experiments with Large Area Graphene Membranes V.P. Adiga, R.A. Barton, I.R. Storch, B.R. Ilic, C.B. Wallin, P.L. McEuen, J.M. Parpia, H.G. Craighead, Cornell University |
| 11:20am | MN-TuM11 Optomechanics of Graphene Resonators R.A. Barton, I.R. Storch, V.P. Adiga, R. Sakakibara, B.R. Cipriany, B.R. Ilic, S. Wang, P. Ong, P.L. McEuen, J.M. Parpia, H.G. Craighead, Cornell University |