| AVS 59th Annual International Symposium and Exhibition | |
| MEMS and NEMS | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MN-MoA1 Invited Paper Acute Stress in Silicon Nitride J.M. Parpia, V.P. Adiga, B. Ilic, R.A. Barton, R. De Alba, Cornell University, I. Wilson-Rae, Technische Universität München, Germany, H.G. Craighead, Cornell University |
| 2:40pm | MN-MoA3 In Situ SEM Micro Tension Tests on Nanoscale Single Crystal Metals and Nanocrystalline Metals M. Yilmaz, J.W. Kysar, Columbia University |
| 3:40pm | MN-MoA6 Fabrication and Testing of Suspended Piezoelectric Nanocomposite Membranes J.R. Fox, S.B. Horowitz, J.P. Cortes, M.S. Allen, A.D. Mathias, L.A. Barkett, Ducommun Miltec, M. Sanghadasa, U.S. Army Aviation and Missile Research Development and Engineering Center |
| 4:00pm | MN-MoA7 Fabrication of Nanoelectromechanical Systems via the Integration of Glancing Angle Deposition Thin Films J.N. Westwood, V.T.K. Sauer, J.K. Kwan, University of Alberta, Canada, W.K. Hiebert, National Institutute for Nanotechnology, Canada, J.C. Sit, University of Alberta, Canada |
| 4:20pm | MN-MoA8 Electroactive Polymeric MEMS Actuators Fabricated by Thermal Imprinting of P(VDF-TrFE-CFE) and Poly(dimethylsiloxane) (PDMS) J. Shkovsky, L. Engel, A. Reuveny, Y. Sverdlov, Y. Shacham-Diamand, D. Schreiber, S. Krylov, Tel Aviv University, Israel |
| 4:40pm | MN-MoA9 A CMOS MEMS Gas Sensor Using Monolayer Protected Gold Nano-Clusters Coating on Three-Dimensional Interdigitated Electrodes Y.C. Chen, C.Y. Chang, National Taiwan University, H.L. Lu, C.-J. Lu, National Taiwan Normal University, W.-C. Tian, National Taiwan University |
| 5:00pm | MN-MoA10 Integration of Functionalized Biological Nanostructures with Conventional Transducer Fabrication Schemes X. Fan, N. Siwak, A. Brown, J. Culver, R. Ghodssi, University of Maryland |
| 5:20pm | MN-MoA11 A Novel Computational and Experimental Methodology for Development of Therapeutic Microdevices for Rapid Reconstitution S. D'hers, Buenos Aires Institute of Technology, Argentina, A. Alexander-katz, N.M. Elman, Massachusetts Institute of Technology |