| AVS 59th Annual International Symposium and Exhibition | |
| MEMS and NEMS | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MN+AS-MoM1 Invited Paper Probing Dynamical Surface and Interfacial Effects in High-Speed Nanoelectromechanical Systems (NEMS) X.-L. Feng, Case Western Reserve University |
| 9:00am | MN+AS-MoM3 Fabrication of Nanomechanical Switch Based on Ultrananocrystalline Diamond Nanowire A.V. Sumant, Argonne National Laboratory, K.J. Pérez Quintero, University of Puerto Rico, D.A. Czaplewski, Argonne National Laboratory |
| 9:20am | MN+AS-MoM4 Carbon Nanotube Templated MEMS: Three Dimensional Microstructures in Semiconductors, Ceramics, and Metals R.C. Davis, L. Barrett, R. Hansen, A. Konneker, D.D. Allred, B.D. Jensen, R. VanFleet, Brigham Young University |
| 9:40am | MN+AS-MoM5 Filling through Silicon vias with a Carbon Nanotube/Copper Matrix M.B. Jordan, M. Rao, The University of Alabama, A.V. Sumant, R.S. Divan, Argonne National Laboratory, S.L. Burkett, The University of Alabama |
| 10:00am | MN+AS-MoM6 Optimization of STiGer Process used to Etch High Aspect Ratio Silicon Microstructures T. Tillocher, P. Lefaucheux, GREMI CNRS/Université d'Orléans, France, J. Ladroue, M. Boufnichel, ST Microelectronics, Tours, France, P. Ranson, R. Dussart, GREMI CNRS/Université d'Orléans, France |
| 11:00am | MN+AS-MoM9 The Effect of Back-action Force for the Electron Tunneling Transduction in MEMS Measurement M.R. Kan, University of Alberta, Canada, Z. Diao, National Institute for Nanotechnology, NRC Canada, V.T.K. Sauer, M.R. Freeman, University of Alberta, Canada, W.K. Hiebert, National Institute for Nanotechnology, NRC Canada |
| 11:20am | MN+AS-MoM10 Electric-Stimulus-Responsive Pluronic Hydrogels as Actuators L. Engel, I. Sokolov, O. Berkh, Tel Aviv University, Israel, K. Adesanya, E. Vanderleyden, P. Dubruel, Ghent University, Belgium, J. Shklovsky, I. Harari, Y. Shacham-Diamand, S. Krylov, Tel Aviv University, Israel |
| 11:40am | MN+AS-MoM11 CMOS MEMS Metal-based Tactile Sensors Development Y.C. Lin, C.J. Hsieh, L.B. Wang, J.C. Liou, W.-C. Tian, National Taiwan University, Taiwan, Republic of China |