AVS 59th Annual International Symposium and Exhibition
    Vacuum Technology Monday Sessions
       Session VT-MoM

Paper VT-MoM9
Long-Term Stability of Hot-Filament Metal-Envelope Enclosed Ionization Gauges

Monday, October 29, 2012, 11:00 am, Room 14

Session: Vacuum Gauging and Metrology
Presenter: J.A. Fedchak, National Institute of Standards and Technology
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Hot-filament ionization gauges are used as secondary standards by calibration laboratories and as transfer standards in intercomparisons among metrology laboratories. A quantitative measurement of gauge stability with respect to the gauge calibration factor is critical for these applications. In addition, gauge stability is important for those who use gauges for process monitoring and control, and for monitoring vacuum quality. We determined the long-term calibration stability of hot-filament metal-envelope enclosed ionization gauges based upon the analysis of repeat calibrations of nine gauges over a 15 year period. All of the gauges were Bayard-Alpert type ionization gauges with an integral metal-envelope surrounding the hot-filament, grid, and collector. The gauges were calibrated repeatedly at the National Institute of Standards and Technology (NIST), but are owned by organizations external to NIST. In all cases, the gauges were removed from the NIST high-vacuum standard after calibration, shipped back to the gauge-owner, and were returned to NIST at a later date (more than 1 year) for re-calibration. Here we present results of the stability study along with discussion of the NIST high vacuum standard and ionization gauge calibration methods.