AVS 59th Annual International Symposium and Exhibition
    Vacuum Technology Monday Sessions
       Session VT-MoM

Paper VT-MoM2
On the Stability of Capacitance Diaphragm Gauges

Monday, October 29, 2012, 8:40 am, Room 14

Session: Vacuum Gauging and Metrology
Presenter: C. Strietzel, INFICON Ltd, Liechtenstein
Authors: M. Wüest, INFICON Ltd, Liechtenstein
C. Strietzel, INFICON Ltd, Liechtenstein
Correspondent: Click to Email
Capacitance Diaphragm Gauges (CDG) are extensively used in critical coating industries due to their stated accuracies. However, the process to which the gauge is exposed to as well as the ambient environment can influence the accuracy of the gauge. Observed effects include e.g. zero pressure drift, span drift, noise, or depositions on the membrane. In this talk we will explore these influences on the accuracy.