Paper TF-ThP18
Wetting Properties of Silicon Incorporated DLC Films
Thursday, November 1, 2012, 6:00 pm, Room Central Hall
Recently, Diamond-like carbon (DLC) films have come to the center stage of developing coatings for moisture resistant lubricant, water repellant and cathode for lithium batteries. Hydrophilic nature of DLC films played an important role in the above applications.
In this study, Silicon incorporated diamond-like carbon films were deposited on aluminum substrate by a radio frequency plasma-enhanced chemical vapor deposition method. The control of hydrophilic of Silicon incorporated diamond-like carbon surfaces has been studied by the use of O2 plasma etching and heat treatment. The characteristic of DLC films was evaluated by various techniques such as Contact angle, Micro Raman spectroscope and Nano indentation. Contact angle of Si-DLC film was about 60°. The contact angle was decreased into about 2° by not only by oxygen plasma treatment for 10min but by heat treatment at 700℃, respectively. In addition, increase of heat treatment temperature makes the contact angle of Si-DLC film decrease.