AVS 59th Annual International Symposium and Exhibition
    Plasma Science and Technology Monday Sessions
       Session PS+EM-MoM

Paper PS+EM-MoM4
A Foldable Microplasma-Generation Device on a Paper Substrate Operating under Atmospheric Pressure

Monday, October 29, 2012, 9:20 am, Room 24

Session: Atmospheric Plasma Processing and Micro Plasmas
Presenter: Y.J. Yang, National Taiwan University, Taiwan, Republic of China
Authors: Y.J. Yang, National Taiwan University, Taiwan, Republic of China
J.H. Tsai, National Taiwan University, Taiwan, Republic of China
Y.C. Liao, National Taiwan University, Taiwan, Republic of China
Y.W. Lu, National Taiwan University, Taiwan, Republic of China
C.C. Hsu, National Taiwan University, Taiwan, Republic of China
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The fabrication of plasma generating devices on paper substrates is presented. The device was fabricated using a screen print process. Stable helium plasmas were ignited in two parallel electrodes with a gap of 237 to 710 μm by a DC power source. When the plasma was ignited with a 0.2 μL salt solution droplet with trace amount of metallic elements applied to the discharge gap, clear metallic emission lines emanated from the plasma. The result suggests that this paper-based device can be used in analytical applications. We demonstrate that a stable helium plasma can be sustained when the substrate is flat, rolled, and folded along various orientations. Microarrays were also fabricated on paper substrates. Stable array of discharges can be ignited by an AC power source with a frequency between 50 Hz to 10 kHz. Preliminary results show that a 10*10 discharge array can be ignited under different atmospheres such as argon, helium, and air by properly adjusting the parameters. This work was supported by National Science Council of Taiwan, the Republic of China (100-2628-E-002-012 and 101-3113-E-002-002).