AVS 59th Annual International Symposium and Exhibition
    Nanomanufacturing Science and Technology Focus Topic Monday Sessions
       Session NM+AS+MS-MoM

Invited Paper NM+AS+MS-MoM1
Nanomanufacturing – Beyond Silicon

Monday, October 29, 2012, 8:20 am, Room 16

Session: Metrology and Environmental Issues in Nanomanufacturing
Presenter: J.A. Liddle, National Institute of Standards and Technology
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The fabrication of integrated circuits in silicon is the preeminent nanomanufacturing technology, and it occupies a very special niche in terms of functionality and value provided per unit area. As a consequence, it is economically viable to use very expensive fabrication processes to generate the required nanostructures. In addition, the degree of control over the manufacturing process that is required necessitates the use of complex and expensive metrology systems. In contrast the vast majority of other nanotechnology products cannot support the cost of comparably sophisticated manufacturing methods or the associated metrology schemes. In this talk I will give examples of how the complexity of the final product and its value dictate what type of nanomanufacturing approach is viable. In particular, I will describe the need for new metrology techniques that can provide nanoscale information, but do so at rates consistent with the high-volume manufacturing of low-cost products.