| AVS 59th Annual International Symposium and Exhibition | |
| MEMS and NEMS | Tuesday Sessions |
| Session MN-TuP |
| Session: | MEMS and NEMS Poster Session |
| Presenter: | A. Kasahara, National Institute for Materials Science (NIMS), Japan |
| Authors: | A. Kasahara, National Institute for Materials Science (NIMS), Japan M. Sasaki, National Institute for Materials Science (NIMS), Japan H. Suzuki, National Institute for Materials Science (NIMS), Japan M. Goto, National Institute for Materials Science (NIMS), Japan M. Tosa, National Institute for Materials Science (NIMS), Japan |
| Correspondent: | Click to Email |
Recent nano-technology researches have created various advanced micro-nano materials.
In particular, there have been many reports on nano-meter-scale tubes and wires such as carbon nanotubes
and silicon wires.
We have prepared long crystal silicon wires with a diameter of several tens of nano meters at a temperature lower than 523k by using the low-pressure low-temperature CVD method too. To use these as materials for application to micro-nano electromechanical system, we need to fully understand their electric, chemical and mechanical properties.
However, we have not yet to see a genuine, flexible methodology for evaluating the key characteristic of mechanical strength essential to micro-nano structural materials development the nano scale equivalent of mechanical strength testers for ordinary materials.This time, we are developing the device which could support a bending or shearing test.We will discuss our recent results on mechanical strength measurement of micro-nano wires in diameter several nm through several thousand nm and in length several mm by means of prepared micro-nano mechanical strength measurement device.