| AVS 59th Annual International Symposium and Exhibition | |
| In Situ Microscopy and Spectroscopy Focus Topic | Wednesday Sessions |
| Session IS+AS+OX+ET-WeM |
| Session: | In Situ Characterization of Solids: Film Growth, Defects, and Interfaces |
| Presenter: | A.N. Davis, CAMECA Instruments, Inc. |
| Authors: | P. Peres, Cameca, S.a., France F. Desse, Cameca, S.a., France F. HIllion, Cameca, S.a., France M. Schuhmacher, Cameca, S.a., France A.N. Davis, CAMECA Instruments, Inc. |
| Correspondent: | Click to Email |
The advantage of CAMECA IMS Series high performance secondary ion mass spectrometers are well established: extreme sensitivity, high mass resolution, and high dynamic range, providing low detection limits while keeping high analysis throughput. This instrument delivers high analytical performance for a wide range of applications: Si based devices, III-V and II-VI devices, both bulk materials and thin-film technology, as well as for different material science applications.
In order to meet the growing demand in terms of reproducibility and throughput performance as well as ease of use, CAMECA has developed a new IMS series, 7f-Auto.
The primary column has been redesigned in order to provide an easier and faster primary beam tuning. For high efficiency operation, automated routines for tuning the instrument are added for both primary and secondary columns, nominally: aperture adjustment, secondary ion beam centering, detector adjustement, among others. These routines not only increase the ease of use, but also enhance the reproducibility of the instruments by minimizing operator-related biases.
A motorized storage chamber has also been developed allowing to keep, under UHV environment, up to six sample holders. The holder exchange between the storage chamber and analysis chamber is fully motorized and computer controlled, allowing a set of analyses to be performed in automated, unattended mode on multiple sample holders. This significantly improves the throughput of the tool, since up to 24 samples (assuming 4 samples per holder) can be analysed in chained mode, possibly overnight. These developments will be presented and discussed in detail.