| AVS 59th Annual International Symposium and Exhibition | |
| Helium Ion Microscopy Focus Topic | Wednesday Sessions |
| Session HI+AS+NS-WeA |
| Session: | Basics of Helium Ion Microscopy |
| Presenter: | D. Joy, University of Tennessee |
| Correspondent: | Click to Email |
Imaging with a helium ion microscope (HIM) offers numerous advantages, both fundamental and practical, as compared to a conventional scanning electron microscope (SEM). At the same time, however, many aspects of ion microscopy seem very different to those found in the SEM In this presentation therefore we will examine ;
Why ions are a better choice for imaging than electrons and which ion (or ions) might be the best
In which areas of performance and operation the ion beam image is ‘better’
The optimum beam energy for ion imaging for different materials; how typical imaging conditions compare to those for the SEM; and why they are different
The types of signals that are available for imaging in the ion microscope and how they compare with their electron beam counterparts
The problems of specimen charging and beam damage with the ion beams
The options available for microanalysis with the HIM