AVS 59th Annual International Symposium and Exhibition
    Exhibitor Technology Spotlight Tuesday Sessions
       Session EW-TuL

Paper EW-TuL4
Organic Depth Profiling using XPS – Pro’s and Con’s of Different Polyatomic Species

Tuesday, October 30, 2012, 1:00 pm, Room West Hall

Session: Exhibitor Technology Spotlight
Presenter: C. Blomfield, Kratos Analytical Ltd, UK
Authors: C. Blomfield, Kratos Analytical Ltd, UK
S. Hutton, Kratos Analytical Ltd, UK
D. Surman, Kratos Analytical Inc.
Correspondent: Click to Email
XPS depth profiling of organic materials while retaining chemical information has traditionally been problematic. The advent of polyatomic ion species for sputtering has substantially changed the way depth profiling can be carried out. A variety of ion species have been developed such as C60, Coronene and Ar clusters all of which seem to have particular areas (types of materials) that they are suited to. This presentation discusses several of these ion species and what their advantages and disadvantages are and how they can be applied. Examples will be shown ranging from polymers to organic PV materials as well as some inorganic materials.