AVS 59th Annual International Symposium and Exhibition
    Electronic Materials and Processing Thursday Sessions
       Session EM-ThP

Paper EM-ThP13
The Electrical and Thermal Properties of Nanoscale Multilayered Bi2Te3/Sb2Te3 and Bi2Te3/Bi2Te3-xSexThin Films

Thursday, November 1, 2012, 6:00 pm, Room Central Hall

Session: Electronic Materials and Processing Poster Session
Presenter: Z. Xiao, Alabama A&M University
Authors: M. Hines, Alabama A&M University
Z. Xiao, Alabama A&M University
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Nanoscale multilayered Bi2Te3/Sb2Te3 and Bi2Te3/Bi2Te3-xSex thin films were grown using the e-beam evaporation. The in-plane and cross-plane micro thermoelectric devices were fabricated using the clean room-based microfabrication techniques such as UV lithography. The e-beam-grown multilayered thin films and the fabricated thermoelectric devices were measured and characterized. The nanoscale multilayered Bi2Te3/Sb2Te3 and Bi2Te3/Bi2Te3-xSex thin films can have much higher thermoelectric figure of merit than their bulk materials. The measurement results on the electrical and thermal properties of the nanoscale multilayered Bi2Te3/Sb2Te3 and Bi2Te3/Bi2Te3-xSex thin films will be reported in the conference.