AVS 59th Annual International Symposium and Exhibition | |
Spectroscopic Ellipsometry Focus Topic | Monday Sessions |
Session EL+TF+BI+AS+EM+SS-MoA |
Session: | Spectroscopic Ellipsometry: From Organic and Biological Systems to Inorganic Thin Films |
Presenter: | K. Cook, Lehigh University |
Authors: | K. Cook, Lehigh University G.S. Ferguson, Lehigh University |
Correspondent: | Click to Email |
A two-step procedure will be presented for measuring the complex refractive index of an electrochemically produced oxide film on a gold surface. In the first step, the composition and the thickness of the oxide film were determined using angle-resolved X-ray photoelectron spectroscopy. The experimental composition defined the system, thereby avoiding assumptions about the film stoichiometry that would otherwise be required. The value of thickness derived from these measurements was then used to calculate n and k from ellipsometric data collected across the visible spectrum (350 - 800 nm).