| AVS 59th Annual International Symposium and Exhibition | |
| Spectroscopic Ellipsometry Focus Topic | Monday Sessions |
| Session EL+TF+BI+AS+EM+SS-MoA |
| Session: | Spectroscopic Ellipsometry: From Organic and Biological Systems to Inorganic Thin Films |
| Presenter: | D. Schmidt, University of Nebraska-Lincoln |
| Authors: | D. Schmidt, University of Nebraska-Lincoln K.B. Rodenhausen, University of Nebraska-Lincoln J. VanDerslice, J.A. Woollam Co., Inc. T.E. Tiwald, J.A. Woollam Co., Inc. E. Schubert, University of Nebraska-Lincoln M. Schubert, University of Nebraska-Lincoln |
| Correspondent: | Click to Email |
Highly-ordered three-dimensional nanostructure thin films offer substantially increased surface area for attachment of organic layers, and in addition, new detection principles due to the physical properties of the nanostructures. For example, upon material attachment the optical birefringence of the nanostructures changes due to screening of polarization charges. Because of these advantages, highly-ordered three-dimensional nanostructure thin films lend themselves as suitable candidates for studying of organic attachments as well as for low-cost humidity sensing, for example.
We utilize glancing angle electron-beam deposition for fabrication of highly spatially coherent metal slanted columnar thin films. Subsequently, the nanostructures may be further functionalized with thin conformal coatings by means of atomic layer deposition. The ellipsometry model analysis and resulting anisotropic optical properties of hybrid metal slanted columnar thin films determined by generalized spectroscopic ellipsometry in the visible and near-infrared spectral region will be discussed. We will be reviewing research in this area and report in particular on in-situ monitoring of organic attachments using ellipsometry combined with quartz crystal microbalance with dissipation. Exemplarily, we discuss studies of fibronectin protein adsorption, octanethiol chemisorption (self-assembled monolayer growth) on platinum coated titanium slanted columnar thin films as well as relative humidity sensing.