AVS 58th Annual International Symposium and Exhibition | |
Vacuum Technology Division | Monday Sessions |
Session VT-MoM |
Session: | Vacuum Measurement, Calibration & Primary Standards, Gas Flow and Permeation |
Presenter: | Michael Duncan, Oak Ridge National Laboratory |
Authors: | M.L. Duncan, Oak Ridge National Laboratory J.A. Keck, Oak Ridge National Laboratory |
Correspondent: | Click to Email |
The spinning rotor gage (SRG) has long been the primary transfer standard used by metrology laboratories for providing traceability of measurements from field vacuum devices to primary vacuum standards maintained at national measurement institutes. The useful range of the SRG, in its current commercial form, is somewhat limited by several factors including the relatively small change in momentum of the rotating sphere caused by the adsorption/desorption of gas molecules as the gas pressure (and thus number of molecules adsorbing/desorbing) decreases. Current technology limits the low pressure end of this range to about 2E-5 Pa with a K=2 uncertainty of approximately 1-3%.
Efforts are currently underway at the Oak Ridge National Laboratory to increase the range of the commercial SRG by approximately a decade by increasing the sensitivity of the rotor's momentum change to the low number of gas molecules available for adsorption/desorption at the lower pressures. Efforts are also underway to improve the uncertainty of the existing commercial SRG through better measurement and characterization of the thermal expansion of the spinning rotor itself. This paper will report on the progress of these efforts to date, some of the challenges discovered during the development process and plans to address those challenges