AVS 58th Annual International Symposium and Exhibition
    Nanomanufacturing Science and Technology Focus Topic Tuesday Sessions
       Session NM+NS+MS-TuA

Invited Paper NM+NS+MS-TuA1
Assessing Nanotechnologies for Volume Manufacturing

Tuesday, November 1, 2011, 2:00 pm, Room 207

Session: Manufacturable Nanoscale Devices and Processes
Presenter: Brian E. Goodlin, Texas Instruments Incorporated
Authors: B.E. Goodlin, Texas Instruments Incorporated
S. Butler, Texas Instruments Incorporated
L. Colombo, Texas Instruments Incorporated
R. Doering, Texas Instruments Incorporated
Correspondent: Click to Email
Over the past several years, we have seen significant advances in nanotechnology. Much of the underlying purpose of “nanotechnology” research and development, at least as it applies to the electronics industry, is to revolutionize mainstream technology through the use of unique properties and capabilities of nanomaterials, like Si nanowires, graphene, CNTs, in an effort to provide advantages that could not be otherwise obtained thru evolutionary technology scaling. However, the ultimate goal of adopting such technologies into volume manufacturing will most certainly rely on the same tried and tested principles that govern adoption for mainstream manufacturing. Such principles include: performance (does the process hit the desired target?), cost (is it more/less costly as compared to alternatives?), capability (how reproducible is the process?), throughput (how many product can be produced and at what rate?), yield/defectivity, reliability, controllability/metrology (can the process be controlled and what measurements are needed?), maintainability (is equipment/process required easy to maintain?). Do these same governing manufacturing principles truly apply for nanotechnologies? If so, how do some of the current nanotechnologies fare? What gaps exist? Is sufficient focus being applied to address these gaps? Can we even provide adequate answers to these questions yet? Prior to addressing these questions, one must first step back and clearly identify the important, unique requirements (process, materials, equipment) that exist for a given nanotechnology to enable delivery of the desired performance. Also, one must consider interactions and compatibility of the processes with upstream and downstream processes that are necessary for the final product. Have such requirements and interactions been thought out clearly for various nanotechnologies? If so what are the requirements? What are the interactions? This talk will seek to investigate answers to these questions in an effort to assess various emerging nanotechnologies and their capabilities for eventual adoption into volume manufacturing.