AVS 58th Annual International Symposium and Exhibition
    Nanomanufacturing Science and Technology Focus Topic Monday Sessions
       Session NM+MS+NS+TF-MoM

Invited Paper NM+MS+NS+TF-MoM8
Atomic Layer Deposition for Continuous Roll-to-Roll Processing

Monday, October 31, 2011, 10:40 am, Room 207

Session: ALD for Nanomanufacturing
Presenter: Steven M. George, University of Colorado at Boulder
Authors: S.M. George, University of Colorado at Boulder
P.R. P. Ryan Fitzpatrick, University of Colorado at Boulder
Correspondent: Click to Email
Atomic layer deposition (ALD) is currently being developed for continuous roll-to-roll processing. This development is significant because roll-to-roll processing would allow ALD to address many applications in a cost effective manner. This talk overviews the approaches and progress to date. The original idea of ALD with moving substrates and constant precursor flows was presented in a patent by Suntola and Antson in 1977. This scheme involved rotating the substrate between alternating precursor sources and vacuum pumping regions. One current approach under development is based on moving the substrate close to a gas source head. The ALD precursors continuously flow through slits in the gas source head that are separated and isolated by inert gas purging. A second version of this design involves using a gas bearing to set the gap spacing between the gas source head and substrate. Another ongoing approach is based on moving the substrate through separate regions of precursor pressure and inert gas purging. Limited conductance between the regions prevents the gas phase reaction of the ALD precursors. The talk examines the issues and prospects for achieving ALD for continuous roll-to-roll processing. Additional details are presented for the dependence of precursor isolation on reactor parameters for a substrate under a model gas source head.