| AVS 57th International Symposium & Exhibition | |
| Vacuum Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| VT-TuP1 Vacuum Pressure Simulation for the Hard X-Ray Insertion Device Beamline 17A at NSLS J.-P. Hu, Brookhaven National Laboratory |
| VT-TuP2 Yttria/ Rhenium Alloy Emission Filaments for Analytical Instrumentation J. Manura, R. Shomo, C. Baker, Scientific Instrument Services |
| VT-TuP3 Calibration of Ultra-High Vacuum Gauge from 10-9 Pa to 10-5 Pa by Two-Stage Flow-Dividing System H. Yoshida, K. Arai, M. Hirata, H. Akimichi, National Institute of Advanced Industrial Science and Technology (AIST), Japan |
| VT-TuP4 Simultaneous Measurement of Pressure and Viscosity with a Resonant Sensor in a Viscous Flowing Gas A. Kurokawa, AIST, Japan, H. Hojo, T. Kobayashi, VPI Co., Japan |
| VT-TuP5 Study on Calibration Methods of Discharge Coefficient of Sonic Nozzles using Constant Volume Flow Meter W.S. Cheung, J.H. Shin, S.B. Kang, K.A. Park, J.Y. Lim, KRISS, Republic of Korea |
| VT-TuP6 High-k Gate Dielectric and Electrical and Surface Studies of Al2O3, HfO2, La2O3, AlxHfyOz, and ZrO2/HfO2 on Silicon via Atomic Layer Deposition G. Hernandez, R. Candler, S. Franz, Y.S. Lin, UCLA |
| VT-TuP7 Overview of Anharmonic Resonant Ion Trap Mass Spectrometry Technology P. Acomb, G. Brucker, K. Van Antwerp, M.N. Schott, Brooks Automation, Inc. |
| VT-TuP9 A Computationally Simple, Wafer-to-Feature-Level Model of Etch Rate Variation in Deep Reactive Ion Etching J.O. Diaz, H.K. Taylor, Massachusetts Institute of Technology, R.J. Shul, R.L. Jarecki, T.M. Bauer, Sandia National Laboratories, D.S. Boning, Massachusetts Institute of Technology, D.L. Hetherington, Sandia National Laboratories |
| VT-TuP10 Design, Simulation, and Implementation of Plasma Enhanced Atomic Layer Deposition in a Laminar Flow Reactor K. Kellogg, P. Falvo, University of South Florida, S. Lee, University of South Florida, T. Wright, J. Wang, University of South Florida |
| VT-TuP11 A Cryogenic Vacuum Chamber for Low Temperature Thermophotovoltaic Testing D. DeMeo, T. Vandervelde, Tufts University |
| VT-TuP12 Experimental Approach to Equalizing the Orifice Method with the Throughput One for the Measurement of TMP Pumping Speed J.Y. Lim, S.B. Kang, J.H. Shin, Korea Research Institute of Standards and Sciences, Republic of Korea, D.J. Cha, Kunsan National University, Republic of Korea, D.Y. Koh, Korea Institute of Machinery and Materials, Republic of Korea, W.S. Cheung, Korea Research Institute of Standards and Sciences, Republic of Korea |
| VT-TuP13 Implementation of a Lambertson Magnet in an Ultrahigh Vacuum Electron Storage Ring V. Anferov, J. Doskow, G. East, S.Y. Lee, T. Rinckel, C. Romel, T. Sloan, P. Sokol, Indiana University |