| AVS 57th International Symposium & Exhibition | |
| Tribology Focus Topic | Wednesday Sessions |
| Session TR+MN+NS+SS-WeM |
| Session: | Influence of Atmosphere, Temperature, and Materials on Friction |
| Presenter: | E. Flater, Luther College |
| Authors: | O. Matthews, Luther College S. Barkley, Luther College C. Bouxsein, St. Olaf College M. Deram, St. Olaf College N. Eigenfeld, St. Olaf College A. Poda, Auburn University W.R. Ashurst, Auburn University B. Borovsky, St. Olaf College E. Flater, Luther College |
| Correspondent: | Click to Email |
Microelectromechanical systems (MEMS) are critically-limited by interfacial phenomena such as friction and adhesion. The most common method of reducing friction between MEMS surfaces is the use of molecularly-thin self-assembled monolayer (SAM) coatings. Typically silicon MEMS have been coated with silane-based SAMs, such as octadecyltrichlorosilane (OTS), and have resulted in some modest improvement in device performance and lifetime. Continued progress in the development of MEMS may require new materials systems to be implemented. Through a collaborative effort, we investigate the frictional properties of octadecylphosphonic acid monolayers deposited on aluminum oxide surfaces across speed regimes. Measurements using an atomic force microscope (AFM) and a nanoindenter-quartz crystal microbalance are performed each with a microsphere-terminated probe. This allows for a comparative study with similar contact sizes, pressures, surface roughness, and interfacial chemistry. Speeds between the different instruments range from microns per second to meters per second. Preliminary AFM friction vs. load and friction vs. velocity measurements are presented, with the goal of investigating phosphonate SAM/ metal oxide systems as alternative MEMS materials.