AVS 57th International Symposium & Exhibition
    Tribology Focus Topic Wednesday Sessions
       Session TR+MN+NS+SS-WeM

Paper TR+MN+NS+SS-WeM4
Mechanistic Aspects of Vapor Phase Lubrication of Silicon

Wednesday, October 20, 2010, 9:00 am, Room Tesuque

Session: Influence of Atmosphere, Temperature, and Materials on Friction
Presenter: M.T. Dugger, Sandia National Laboratories
Authors: M.T. Dugger, Sandia National Laboratories
J.A. Ohlhausen, Sandia National Laboratories
S.M. Dirk, Sandia National Laboratories
Correspondent: Click to Email

The lubrication of silicon surfaces with alcohol vapors has recently been demonstrated [D.B. Asay, et. al, Langmuir 24 (2007) p.155]. With a sufficient concentration of pentanol vapor present, sliding of a silica ball on an oxidized silicon wafer can proceed with no measurable wear. The initial results of time-of-flight secondary ion mass spectrometry (ToF-SIMS) analysis of wear surfaces revealed a reaction product having thickness on the order of a monolayer, and with an ion spectrum that included fragments having molecular weights of 200 or more that occurred only inside the wear tracks. The parent alcohol molecule (pentanol) has molecular weight of 88 amu, suggesting that reactions of adsorbed alcohols on the wearing surfaces allowed polymerization of the alcohols to form higher molecular weight species. In addition to pin-on-disk studies, lubrication of silicon surfaces with pentanol vapors has also been demonstrated using MicroElectroMechanical Systems (MEMS) devices. Extraordinary increases in the operating life of MEMS devices have been observed with vapor phase lubrication. Devices with thermal actuators as well as electrostatic actuators have been successfully operated, demonstrating that the heated surfaces of the thermal actuators do not form prohibitively large amounts of reaction product from the alcohol vapor. The same reaction product between pentanol and the silicon surface observed in pin-on-disk tests has also been found on MEMS contacting surfaces using ToF-SIMS analysis.

Recent investigations of the reaction mechanisms of the alcohol molecules with the oxidized silicon surfaces have shown that wearless sliding requires a concentration of the alcohol vapor that is dependent upon the contact stress during sliding, with higher stress requiring a greater concentration of alcohol. Different vapor precursors including those with acid functionality, olefins, and methyl termination also produce polymeric reaction products, and can lubricate the silica surfaces. Doping the operating environment with oxygen was found to quench the formation of the polymeric reaction product, and demonstrates that polymer formation is not necessary for wearless sliding.