| AVS 57th International Symposium & Exhibition | |
| Thin Film | Thursday Sessions |
| Session TF-ThP |
| Session: | Thin Film Poster Session II |
| Presenter: | K. Hong, Kunsan National University, Republic of Korea |
| Authors: | K. Hong, Kunsan National University, Republic of Korea W. Yang, Kunsan National University, Republic of Korea J. Joo, Kunsan National University, Republic of Korea |
| Correspondent: | Click to Email |
Deposition temperature uniformity of GaN based MQW(multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Two types of heater were tested: a resistive and inductive heater. Varying the gap between the heater and the susceptor, temperature uniformity was assessed by infra-red images for both cases of a static and a rotating susceptor. The best non-uniformity of resistive heater was obtained at 3 mm gap, 6.2%. Rotating the susceptor at 2.5 rpm over the induction heater gave 4.3% of temperature non-uniformity. Temperature distribution of the graphite susceptor over the induction heater was numerically modelled and agreed with experimental results.