| AVS 57th International Symposium & Exhibition | |
| Surface Science | Wednesday Sessions |
| Session SS2-WeM |
| Session: | Electron, Photon and Ion Beam Induced Surface Modification |
| Presenter: | H. Fairbrother, Johns Hopkins University |
| Authors: | H. Fairbrother, Johns Hopkins University J. Wnuk, Princeton University J. Gorham, National Institute of Standards and Technology S. Rosenberg, Johns Hopkins University C.W. Hagen, TU Delft, the Netherlands W. van Dorp, University of Groningen, the Netherlands |
| Correspondent: | Click to Email |
Electron beam induced deposition (EBID) is attracting increased interest as a single-step, direct-write process capable of depositing free standing, nanometer-sized structures with high spatial resolution (≈ 1 nm). However, the largest single limitation of EBID is that the deposited metallic nanostructures typically contain unacceptable levels of organic contamination which adversely affects the material’s properties, thereby limiting potential applications. A more detailed understanding of the electron stimulated, decomposition of EBID precursors is needed to rationalize the relationships between organometallic ligand architecture and the composition of the deposits. Such mechanistic detail will allow greater control over the composition and function of nanostructures deposited by EBID while providing the necessary rational design criteria to fashion new organometallic precursors. Other scientific issues associated with EBID include a lack of quantitative information on the fundamental surface dynamics and deposition processes as well as overcoming the challenges of implementing successful purification strategies. The application of surface analytical techniques enables changes in the metal oxidation state, surface and gas phase composition as well as structure and chemical composition that accompany electron interactions with organometallic precursors to be studied in situ and in real time. In addition, I will describe how these various electron stimulated processes can be studied to extract data on reaction cross-sections and kinetics, information that would facilitate the development and testing of predictive models that can accurately describe EBID. Mechanistic insights into purification strategies that can be obtained through surface analytical techniques are also detailed. Throughout, I will discuss unresolved challenges and opportunities associated with EBID.