| AVS 57th International Symposium & Exhibition | |
| MEMS and NEMS | Friday Sessions |
| Session MN-FrM |
| Session: | Characterization for MEMS and NEMS |
| Presenter: | W.-C. Tian, National Taiwan University, Republic of China |
| Authors: | C.-H. Chen, National Taiwan University, Republic of China C.-J. Hsieh, National Taiwan University, Republic of China H.-K. Lin, National Taiwan University, Republic of China T.-S. Lee, National Taiwan University, Republic of China P.-H. Chen, National Taiwan University, Republic of China C.-H. Chou, National Taiwan University, Republic of China C.-J. Lu, National Taiwan Normal University, Republic of China W.-C. Tian, National Taiwan University, Republic of China |
| Correspondent: | Click to Email |
This research reports the developments and characterizations of two types of NEMS gas detectors, based on nano-scaled titanium oxide (TiO2) and monolayer protected gold nanoclusters (MPCs) as a sensing film of chemiresistors. For sensing films based on chemically synthesized MPCs, the diversified selectivity (>10 compound detection based on various MPC shell structures), the fast response (<10 seconds) and the low power consumption (25 μW) are its main advantages. However, the irreversible adsorption due to the strong affinity between MPCs and vapor molecules could be problematic. On the other hand, nano-structured TiO2 film, which is operated at elevated temperature, is inherently immune from irreversible condensation. The TiO2 sensing film is fabricated through E-beam lithography in the present study. Various shapes of nano-structures are precisely aligned and placed in between microelectrodes to mimic nano-crystalline structures for the enhancement of the detector sensitivity and robustness. In addition, these NEMS gas detectors are conditioned with integrated heaters at a controlled temperature to minimize any interfering gas adsorption in between analysis. Various performance evaluations including the characterizations of two types of detectors at different temperatures, test chemicals, detection limits, and the compatibility with a gas chromatography system, are investigated and to be presented.